TY  - BOOK
AU  - Madou,Marc J.
TI  - Fundamentals of microfabrication: the science of miniaturization 
SN  - 0849308267 (alk. paper)
AV  - TK7836 .M33 2002
U1  - 621.366/MAD 
PY  - 2002///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectronics
KW  - Integrated circuits
KW  - Design and construction
KW  - Microelectromechanical systems
KW  - Machining
KW  - Microelectronic packaging
KW  - Lasers
KW  - Industrial applications
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0646/2001043273-d.html
ER  -