TY  - BOOK
AU  - Lyshevski,Sergey Edward
TI  - MEMS and NEMS: systems, devices, and structures 
SN  - 0849312620 (alk. paper)
AV  - TK7875 .L9597 2002
U1  - 621.3.049.77 LYS 
PY  - 2002///
CY  - Boca Raton, Fla.
PB  - CRC Press
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0646/2001049944-d.html
ER  -