TY  - BOOK
AU  - Maluf,Nadim
AU  - Williams,Kirt
TI  - Introduction to microelectromechanical systems engineering
SN  - 1580535909 (alk. paper)
AV  - TK7875 .M35 2004
U1  - 621.3.049 MAL 
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -