TY  - BOOK
AU  - Gardner,J.W.
AU  - Varadan,V.K.
AU  - Awadelkarim,Osama O.
TI  - Microsensors, MEMS, and smart devices
SN  - 047186109X (alk. paper)
AV  - TK7875 .G37 2001
U1  - 621.381 21
PY  - 2001///
CY  - Chichester
PB  - John Wiley and Sons
KW  - Microelectromechanical systems
KW  - Detectors
KW  - Intelligent control systems
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/description/wiley034/2001024353.html
UR  - http://www.loc.gov/catdir/toc/onix06/2001024353.html
ER  -