TY  - BOOK
AU  - Liu,Chang
AU  - 
TI  - Foundations of MEMS
SN  - 0131472860
AV  - TK7875 .L48 2006
U1  - 621.3 22
PY  - 2006///
CY  - New Jersey
PB  - Pearson Education
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -