TY  - BOOK
AU  - Campbell,Stephen A.
TI  - The science and engineering of microelectronic fabrication
SN  - 0195136055
AV  - TK7871.85 .C25 2001
U1  - 621.3815/2 21
PY  - 2004///
CY  - New York
PB  - Oxford University Press
KW  - Semiconductors
KW  - Design and construction
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0610/00051022-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0610/00051022-t.html
ER  -