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Introduction to microelectronic fabrication /

by Jaeger, Richard C.

Series: Modular series on solid state devices ; . v. 5 Edition statement:2nd ed. Published by : Prentice Hall, (Upper Saddle River, N.J. :) Physical details: xiv, 316 p. : ill. ; 24 cm. ISBN:0201444941.

Subject(s): Integrated circuits -- Very large scale integration -- Design and construction -- Textbooks.

Year: 2002

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