Madou, Marc J.
Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou. - 2nd ed. - Boca Raton : CRC Press, c2002. - 723 p. : col. ill. ; 29 cm.
Includes bibliographical references and index.
0849308267 (alk. paper)
2001043273
Microelectronics.
Integrated circuits--Design and construction.
Microelectromechanical systems--Design and construction.
Machining.
Microelectronic packaging.
Lasers--Industrial applications.
TK7836 / .M33 2002
621.366/MAD
Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou. - 2nd ed. - Boca Raton : CRC Press, c2002. - 723 p. : col. ill. ; 29 cm.
Includes bibliographical references and index.
0849308267 (alk. paper)
2001043273
Microelectronics.
Integrated circuits--Design and construction.
Microelectromechanical systems--Design and construction.
Machining.
Microelectronic packaging.
Lasers--Industrial applications.
TK7836 / .M33 2002
621.366/MAD