Lyshevski, Sergey Edward.
MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski. - Boca Raton, Fla. : CRC Press, c2002. - 461 p. : ill. ; 25 cm. - Nano- and microscience, engineering, technology, and medicine series .
Includes bibliographical references and index.
0849312620 (alk. paper)
2001049944
Microelectromechanical systems.
TK7875 / .L9597 2002
621.3.049.77 LYS
MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski. - Boca Raton, Fla. : CRC Press, c2002. - 461 p. : ill. ; 25 cm. - Nano- and microscience, engineering, technology, and medicine series .
Includes bibliographical references and index.
0849312620 (alk. paper)
2001049944
Microelectromechanical systems.
TK7875 / .L9597 2002
621.3.049.77 LYS