Scientific Information Resource Centre, NCRA-TIFR

Maluf, Nadim.

Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams. - 2nd ed. - Boston : Artech House, 2004. - xx, 283 p. : ill. ; 26 cm. - Microelectromechanical systems series .

Includes bibliographical references and index.

1580535909 (alk. paper)

2004050669


Microelectromechanical systems.

TK7875 / .M35 2004

621.3.049 MAL