Maluf, Nadim.
Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams. - 2nd ed. - Boston : Artech House, 2004. - xx, 283 p. : ill. ; 26 cm. - Microelectromechanical systems series .
Includes bibliographical references and index.
1580535909 (alk. paper)
2004050669
Microelectromechanical systems.
TK7875 / .M35 2004
621.3.049 MAL
Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams. - 2nd ed. - Boston : Artech House, 2004. - xx, 283 p. : ill. ; 26 cm. - Microelectromechanical systems series .
Includes bibliographical references and index.
1580535909 (alk. paper)
2004050669
Microelectromechanical systems.
TK7875 / .M35 2004
621.3.049 MAL