Gardner, J. W. 1958-
Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim. - Chichester ; John Wiley and Sons, 2001. - xvi, 503 p. : ill. ; 25 cm.
Includes bibliographical references and index.
047186109X (alk. paper)
2001024353
Microelectromechanical systems.
Detectors.
Intelligent control systems.
TK7875 / .G37 2001
621.381
Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim. - Chichester ; John Wiley and Sons, 2001. - xvi, 503 p. : ill. ; 25 cm.
Includes bibliographical references and index.
047186109X (alk. paper)
2001024353
Microelectromechanical systems.
Detectors.
Intelligent control systems.
TK7875 / .G37 2001
621.381