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Liu, Chang, Ph.D.

Foundations of MEMS / Chang Liu. - New Jersey : Pearson Education, 2006. - xxii, 530 p. : ill. ; 25 cm. - Illinois ECE Series .

Includes bibliographical references and index.

ISBN: 0131472860

LCCN: 2005048932

Nat. Bib. No.: GBA556371 bnb

Nat. Bib. Agency Control No.: 013245250 Uk

Subjects--Topical Terms:
Microelectromechanical systems.

LC Class. No.: TK7875 / .L48 2006

Dewey Class. No.: 621.3

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